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铁镍合金在硝酸钠溶液中的激光化学刻蚀 被引量:2

Laser Chemical Etching of Nickel-Iron Alloy in Sodium Nitrate Solution
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摘要 利用氩离子激光,在较低的激光功率下,对铁镍合金(Ni=52%)在硝酸钠溶液中的激光化学刻蚀作了研究,给出了刻蚀速率与激光功率和溶液浓度之间的关系曲线,分析了刻蚀的机理。 In this paper, an investigation of the laser chemical etching of the Nickel-ironalloy(Ni=52%) in sodium nitrate solution by using a relatively low power Argon-ion laser hadbeen made, etching rates had been determined as a function of laser power and solution concent-ration, etching mechanism had been analysed.
出处 《应用激光》 CSCD 北大核心 1992年第2期59-61,共3页 Applied Laser
关键词 激光化学刻蚀 刻蚀速率 铁镍合金 laser chemical etching etching rate
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参考文献1

  • 1应用激光研究溢流坝面流速分布[J]力学学报,1977(01).

同被引文献18

  • 1Datta M, Romankiw L. Application of chemical and electro- chemical micromachining in electronics industry [J]. Journal of the Electrochemical Society, 1989, 136 (6) : 285 -292.
  • 2Datta M, Romankiw L T, Vigliotti D R, et al. Laser etching of metals in neural salt solutions [ J ]. Appl. Phys. Lett. , 1987, 51: 2040-2043.
  • 3Von Gutfeld R J, Sheppard K G. Electrochemical microfabfication by laser-enhanced photothermal processes [ J ]. IBM Journal of Research and Development, 1998, 42 (5): 639 - 654.
  • 4Nowak R, Metev S. Thermochemical laser etching of stainless steel and titanium in liquids [ J ]. Applied Physics A: Materials Science & Processing, 1996, 63 (2) : 133 - 138.
  • 5Metev S, Stephen A, Schwarz, et al. Laser-induced chemical micro-treatment and synthesis of materials [ J ]. RIKEN REVIEW: Focused on Laser Precision Microfabrication ( LPM 2002), 2003, 5 : 47 - 52.
  • 6Kohl P A. Photoetectrochemical etching of semiconductors [J]. IBM Journal of Research and Development, 1998, 42 (5) : 629 - 637.
  • 7宋登元 郭宝增 李宝通.Ar^+激光诱导湿刻si的特性研究.激光技术,1999,23(3):190-193.
  • 8宋登元,郭宝增,李宝通.Ar~+激光诱导湿刻Si的特性研究[J].激光技术.1999(03)
  • 9R. Nowak,S. Metev.Thermochemical laser etching of stainless steel and titanium in liquids[J].Applied Physics A Materials Science & Processing.1996(2)
  • 10Simeon Metev,Andreas Stephen,et al.Laser-induced chemical mi-cro-treatment and synthesis of materials[].RIKEN Rev.2003

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