摘要
本文论述和推导用表面粗糙度来评价超光滑表面特性的数学表达式,并列举已经用于超低散射反射镜、未镀膜基层的几种表面粗糙度的测量方法、使用的仪器及其适用范围,进而对测量结果进行了分析。指出这些方法的优缺点,揭示不同方法所得测量结果产生差异的原因。
The mathematical expressions for evaluating extra smooth surface property by use of surface roughness are described and derived. Several methods of measuring the surface roughnesses of ultra—low scatter reflector and uncoated substrate and the measuring instruments are described, then their measurement results are analyzed, the advantages and disadvantages of these methods are indicated. Finally, the differences of the measuring results abtained with the different methods are disclosed.
出处
《应用光学》
CAS
CSCD
1992年第5期48-54,共7页
Journal of Applied Optics
关键词
反射镜
测量
表面粗糙率
low scatter reflector, surface roughness, measurement
