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AlN陶瓷表面钛金属化沉积的动力学研究 被引量:2

Kinetics of Titanium Deposition of AlN Ceramic Surface by Molten Salt Disproportional Reaction
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摘要 利用融盐热歧化反应进行了氮化铝陶瓷表面钛金属化沉积的动力学研究。结果表明 ,氮化铝陶瓷表面钛膜的厚度随着反应温度和反应时间的增加而增加 ,膜的厚度与反应时间成很好的线性关系 ,沉积速率与融盐中K2 TiF6的起始浓度成线性关系 ,沉积过程是受融盐与氮化铝陶瓷基体之间的界面反应控制。其沉积过程的活化能为 130kJ/mol。 The kinetics of titanium deposition on AlN ceramic surface by heat disproportional reaction was studied.It shows that the thickness of the coatings increase with temperature and time,and there appeares a good linear relation between the layer thickness and the time.The deposition rate increase linearly with the initial concentration of potassium fluorotitanate(K 2TiF 6%) 0in salt.It is estimated that the deposition process is controlled by interface reaction between molten salt and AlN substrate.In the present experiments,the activation energy in the process of titanium deposition on AlN ceramics is 130kJ/mol.
出处 《硅酸盐通报》 CAS CSCD 2004年第1期8-12,共5页 Bulletin of the Chinese Ceramic Society
基金 国家自然科学基金资助项目 ( 5 9862 0 0 1) 广西自然科学基金匹配项目 ( 9912 0 14 )
关键词 氮化铝陶瓷 表面钛金属化 沉积 热歧化 动力学 AlN ceramic disproportionation metallization kinetics
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参考文献10

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