摘要
微纳定位/进给技术是微纳科学技术、微电子工程、航空航天等领域的关键基础技术。它同时也是微纳科学技术走向产业化的前提。本文就当前几种典型的微纳定位/进给技术做一个总结,分析了各种定位/进给机构的定位/进给原理和具体结构,指出了存在的问题和可能的解决方法。
Micro-nano positioning /driving technologies are the essential ones for micro-nano science&technology,micro electric engineering and aeronautic&aerospace etc.It is the premise for their industrialization.Some representative micro-nano positioning /driving technologies are surveyed in the paper,their theories and specific structures are analysed.Problems are defined and possible solutions are proposed.
出处
《微纳电子技术》
CAS
2003年第5期40-44,共5页
Micronanoelectronic Technology
