摘要
应用干涉法测非球面,必须测量参考球面的曲率半径才能得到非球面的面形,因此需要精密的测长机构.本文介绍一种在一维测量时,用数学方法确定非球面最佳参考圆的参数,进而由干涉图求得非球面面形或面形误差的新方法,从而可省去测长机构.所提出的微扰动阻尼牛顿迭代法求非线性最小二乘解,经实践证明,有很好的迭代效果.
In order to get the surface error of an optical aspherical surface by using interference method, the curvature radius of the reference sphere must be precisely measured, therefore, a high precision apparatus of measuring the length has to be used. This paper introduces a new method that using pure mathematical method determines the parameters of the best fitting reference circle (one dimension measurement). Using this method, we can get the surface error of aspherical surface from the interference pattern.
出处
《西安工业学院学报》
1992年第4期34-39,共6页
Journal of Xi'an Institute of Technology
关键词
光学零件
误差
迭代法
最佳参考圆
optical parts
error
iteration method
the best fitting reference circle
