摘要
采用磁流体动力学理论,考虑了电子与中性粒子的非弹性碰撞,应用有限差分法研究了直流辉光放电氩等离子体的轴向动力学过程,得到了氩等离子体密度、输运速度、温度以及电位的轴向分布,发现了气体压强和电极间距的变化对阴极区的电子密度有较大的影响,而对阴极区的离子密度的影响甚微。
We study one dimensional dynamics of dc glow discharge for parallel plates, taking into account the effect of inelastic collisions between electrons and neutral particles on the energy and momentum loss by the MHD theory. The distributions of density, velocity and temperature of plasma and the electric field for Ar plasma are obtained. It is found that the gas pressure and the electrode spacing give significant influence on electron density in the cathode region, but the influence on ion density is small.
出处
《物理学报》
SCIE
EI
CAS
CSCD
北大核心
1992年第1期56-61,共6页
Acta Physica Sinica
基金
国家自然科学基金
