摘要
为解决传统的TiCl_4-H_2-H_2体系进行PCVD TiN过程中对炉体和真空系统的腐蚀、氯元素进入涂层等问题,作者采用金属有机物TPT或TET代替TiCl_4作为供钛源进行PAMOCVD涂层处理。研究了不同工艺参数对涂层性能的影响。通过对涂层钻头、冲头寿命的对比试验表明:PAMOCVD涂层钻头比未涂层的提高近6倍;比PCVDTiN涂层钻头提高2—3倍;标准件冲头PAMOCVD涂层比不涂层提高寿命1—2倍,并解决了对设备的腐蚀问题。
To reduce the corrosion effect on the oven body and on the vacuum system due to conven- tional PCVD TiN process by means of TiCl_4-H_2-H_2 treatment which causes chlorine to enter into the coating,the authors make use of organometallic substances TPT or TET instead of TiCl_4 as the Ti source for PAMCOVD process.Various technological parameters affecting the performance of the coating are studied.Comparison of PAMCOVD treated drill bit and formed punch with their uncoated counterparts indicates that,in terms of their service life,PAMCOVD treated drill bit surpasses the un- coated one by 6 times;surpasses PCVD TiN coated one by 2—3 times;PAMCOVD treated formed punch exceeds the uncoated one by 1—2 times.Corrosion of equipment caused by the treatment is also prevented.
关键词
等离子体
气相沉积
钛有机物
plasma
vapor deposition
organotitanium compounds
