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锆酸铅薄膜的生长特性与表面化学态 被引量：1

Growth Characterization and Chemical States of Lead Zirconate Thin Films
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摘要 以醋酸铅和异丙醇锆为原料,乙二醇甲醚为溶剂。通过溶胶-凝胶法和快速退火工艺在Pt(111)/Ti/SiO2/Si(100)基片成功地制备出不开裂的钙钛矿PbZrO3薄膜。用XRD和原子力显微镜测量了薄膜随退火温度变化的结构和表面形貌特征,用XPS测试了650°C退火PbZrO3薄膜的表面化学态。 PbZrO3 thin films on Pt(111)/Ti/SiO2/Si(100) substrates were prepared by a SolGel process and rapid thermal annealing (RTA).Using analytically pure lead acetate hydrate Pb(CH3COO)2·3H2O,and zirconiumnproponed Zr(O(CH2)2CH3)4 as starting materials;2methoxyethanol C3H8O2 as a solvent.PbZrO3 films grown on Pt/Ti/SiO2/Si substrates annealed at various temperatures from 450 °C to 650 °C for 10 min,the structure,surface morphology and chemical states have been measured by XRD,AFM and XPS.
作者 唐振方 蒋力立 刘彭义 孙汪典 唐新桂
机构地区 暨南大学理工学院 广东工业大学应用物理系 中国科学院上海硅酸盐研究所
出处 《压电与声光》 CAS CSCD 北大核心 2003年第2期142-145,169,共5页 Piezoelectrics & Acoustooptics
基金 暨南大学青年基金资助项目(640061)
关键词 PbZrO3 薄膜 溶胶-凝胶 表面形貌 化学态 PbZrO_3 thin films Sol-Gel surface morphology chemical states
分类号 TN304 [电子电信—物理电子学]
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参考文献16

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同被引文献9

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压电与声光
2003年 第2期

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