摘要
本文研究了用激光气相法制备的超微 Si 粉在高纯 N_2下的高温氮化过程,并将含游离 Si 较多的超微 Si_3N_4粉进行了相似的处理.实验表明,在常压气氛下,超微 Si 粉在1300℃的高温下能全部氮化生成 Si_3N_4,其颗粒大小及形状基本仍具有激光法的一些优点,含氮量达到39.5%.
In the present paper,the nitriding procedure,performed under the conditions of hightemperature and high pure N_2 atmosphere,of ultrafine Si powders synthesized by laser inducedvapor reaction method has been studied.Ultrafine Si_3N_4 powders containing more free Si wastreated by the similar process.The results show that ultrafine Si_3N_4 ceramic powders can besynthesized by the completely nitriding of ultrafine Si powders in the temperature of 1300 ℃and 0.1MPa pressure,and its physical properties,particle size and shape remained unchangedas that obtained from laser method.The N-content of products is approximate by 39.5%.
出处
《无机材料学报》
SCIE
EI
CAS
CSCD
北大核心
1992年第3期289-293,共5页
Journal of Inorganic Materials
关键词
硅粉氮化
氮化硅
超微粉
陶瓷
Nitriding of silicon powder
Silicon nitride
Ultrafine powder
