摘要
本文介绍一个集成电路工艺优化设计系统GOALSERVER。该系统是多目标优化数学方法与解析式工艺/器件一体化模拟的结合,它可根据对各器件特性的具体要求迅速、自动地选择工艺制造控制参数,使得各项器件特性同时达到最优。设计了一种工艺优化设计描述语言,使得系统具有良好的用户界面。新的多目标优化算法使得变量初值易于选择且易于获得满意的最优解。最后给出一个工艺优化设计的实例。
GOALSERVER, an IC process optimal designing system, is introduced, which is a combination of the multi-object optimizing mathematical method with the analytical simulation of process/device integration, and can rapidly and automatically select pyocessing control parameters to optimize simultancously various device characteristics according to their specific requirements. A descriptive language for process optimization is designed to give the system a good user-interface. The new multi-object optimzation algorithm makes it easy to select the initial value of variables and to achieve satisfactory optimal solution. Finally, an example of technology optimizing design is given.
出处
《微电子学》
CAS
CSCD
1992年第1期32-35,共4页
Microelectronics
基金
国家教委博士点基金
关键词
集成电路
工艺
CAD
工艺模拟
IC process, Process optimization, IC CAD, Process simulation
