摘要
本文提出一种测量表面粗糙度的光学方法.根据Beckman电磁波散射理论和Fourier技术,使用CCD阵列采集光信号,通过软件方法,统计虚拟的楔环光能量,从而得到粗糙度的大小.测得的精度达到0.01μm,并能在线测量.这种测量方法的检测范围在0.01～0.90μm.测量的示值误差小于±10%,重复测量误差小于±5%,一个试件的平均测量时间小于5s.测量系统具有结构简单,体积小,成本较低,不损伤被测件表面的优点.由于测量对试件平台的震动不敏感,以及计算机处理的快速性,这种方法可用于在线检测.
According to Beckman’s magnetic scattering theory and Fourier's technology, collecting optical signal by CCD arrays, evaluating the light energy of imaginary wedges and rings in computer, can acquire the roughness with measurement range between 0.01～0.90 μm ,measurement error less than ±10%, repeating error less than ±5%, average detecting time for one sample less than 5 s. The system is simple in structure, smaller in volume,and costs less, and it can not damage the sample surface. Since this technique is insensitive to the vibration effect of the sample platform, as well as the quickness of treatment processing, it can be used for online detecting .
出处
《哈尔滨工程大学学报》
EI
CAS
CSCD
2003年第5期560-562,共3页
Journal of Harbin Engineering University
关键词
光学
粗糙度
在线检测
optics
roughness
detecting online
