摘要
压电晶体阀是真空充气系统中一种微流量充气阀门。它具有流量小、开启快、可以远程控制等优点,但压电阀门的进气量难以用函数的方式准确描述,而且随着使用时间的增长往往有改变。本文介绍了一种PV 10型阀门的性能测定方法和结果,为HT 7托卡马克聚变装置中性束注入器系统离子源和中性化室充气量确定提供了参考数据。
Piezoelectric valve is often applied to vacuum aerating system as a micro-adjustable charge valve. It has many merits, such as little flux, fast start-up, remote control, etc. But gas throughput of this kind of valve is difficult to be confirmed accurately and easy to change while usage. This article mainly discusses performance measurement method of PV-10 valve, and provides references for ion source and neutralizer aerating system of HT-7 tokamak neutral beam injector system.
出处
《真空》
CAS
北大核心
2003年第6期34-36,共3页
Vacuum
