摘要
考察了用原子力显微镜对单晶硅进行微加工时金刚石针尖的磨损行为 ,对针尖的磨损率、磨损机理以及针尖磨损对微加工过程的影响进行了实验研究和理论分析 .结合对单晶硅所进行的摩擦磨损试验 ,应用计算模型得出针尖的磨损率为 1.7× 10 - 1 0 m m3/(N·m) ;通过对针尖磨损特征的原子力显微镜观察 ,结合金刚石针尖上应力集中的有限元计算及单位切削力计算 。
The wear of the diamond tip of an atomic force microscope in the micromachining of a single crystal silicon surface was studied. The tested wear rate of the diamond tip was comparatively investigated by taking account of the relevant finite element calculation results, while the wear mechanism of the tip and the effect of the tip wear on the micromachining process were explored. The results show that the wear rate of the diamond tip in the micromachining of a single crystal silicon is 1.7x10 -10mm3/(N·m), based on a theoretical model combined with the experimental results. Through combining the observation of the worn tip features of the atomic force microscope, the finite element simulation of the stress distribution and the unit cutting force calculation of the diamond tip, the wear of the diamond tip is inferred to be dominated by chemical wear.
出处
《摩擦学学报》
EI
CAS
CSCD
北大核心
2001年第3期176-181,共6页
Tribology
基金
国家自然科学基金重点项目资助! (5 9835 180 )
哈尔滨工业大学跨学科交叉性研究基金资助! (HIT.MD.2 0 0 0 .9
关键词
原子力显微镜
金刚石针尖
单晶硅
化学磨损
Atomic force microscopy
Diamonds
Finite element method
Silicon
Single crystals
Wear of materials
