摘要
用NanoIndenterⅡ对硼化铪 石英和硼化铪 硅等膜 基结构进行纳米压入测量。通过对测得的载荷—位移曲线进行处理 ,得到硼化铪涂层的弹性模量为 188 78GPa。实验表明 ,较软基底对测量结果的影响较大 ,所得的评定值失真 ,用KING提出的评定模型也未获得较好的结果。因此 ,最大压入深度应在保证压头尖钝化和薄膜表面质量对测量结果影响不太大的情况下尽量减少最大压入深度。
The samples of HfB 2/Si and HfB 2/quartz were indented on Nano Indenter Ⅱ. Through processing their load-displacement curves, the elastic modulus of HfB 2 coating was obtained,whose value is 188.78*!GPa. The experimental results showed that the softer substrate has much influence on the evaluated results, which are seriously distorted, and the better evaluated results were also not obtained by KING model. Therefore, if the less influence of the blunt indenter tip and the surface quality of coating on the evaluated results is guaranteed, it would be better to select the shallower maximum indentation depth.
出处
《机械强度》
CAS
CSCD
北大核心
2003年第5期587-590,共4页
Journal of Mechanical Strength
基金
国家重点基础研究发展规划 (973)项目 (G1 9990 331 0 3)~~
