摘要
本文对离子束表面改性的各种方法和技术水平及其在摩擦学中的应用进行了综述,讨论了为使这种技术更加广泛地应用于实际摩擦学体系还必须研究的一些问题。大量文献资料表明,离子注入是改善材料摩擦学性能的一种有效方法。离子束辅助涂层是新近发展起来的一种离子束表面改性技术,包括离子束增强沉积或离子束辅助沉积、离子束混合和离子束反冲注入。利用它可以制得0.05到几个微米厚的涂层。由于界面的相互扩散混合,离子束辅助涂层能更强地与底材结合,并且常比物理或化学气相沉积的涂层更密实。作者认为,离子束技术今后将在两个相关领域中发展,即直接的离子注入和离子辅助涂层,并且指出离子补助涂层技术将拓宽离子束技术在摩擦学中的应用范围。
Several technologies for ion beam surface modification of materials and its tribological application were reviewed in this paper. The future development tendency of this technology in tribology area has been proposed. A large number of investigations indicated that ion implantation technique is a useful method to modify the tribological property of materials. A recent development is. the ion assisted coating (IAC) or ion assisted deposition (IAD) techniques, which include: ion beam enhanced deposition (IBED) or ion beam assisted deposition (IBAD), ion beam mixing (IBM) and ion recoil implantation (IRI) . Ion assisted coatings can be produced in thickness ranging from 0.05 to several microns. Ion assisted coatings adhere strongly to the substrate due to an intermixed interface and are often denser than PVD and CVD coatings. The future development of ion beam technology appears to lie in two related areast direct ion implantation and ion assisted coating. It is expected that the tribological applications for ion beam technology will be considerably widened by ion assisted coating process.
出处
《摩擦学学报》
EI
CAS
CSCD
北大核心
1992年第1期8-17,共10页
Tribology
关键词
离子束
表面改性
涂层
摩探磨损
ion beam surface modification, ion beam enhanced deposi- tion, ion assisted coating, ion beam mixing, friction and wear
