期刊文献+

压阻式压力传感器的在线综合补偿 被引量:16

On-line comprehensive compensation of piezoresistive pressure sensor
在线阅读 下载PDF
导出
摘要 利用曲面拟合法来建立被测目标参量与传感器输出量之间的对应关系,借助二维标定/校准实验,按最小二乘法原理由实验标定/校准数据计算出均方误差最小时的回归方程中的系数。这样,当测得了传感器的输出值时,就可由已知系数的多维回归方程来计算相应的输入被测目标参数。该算法应用于压阻式压力传感器,在进行温度补偿的同时也进行了非线性校正,使传感器的读数准确度达到0.05%,同时利用传感器自身的RS232接口对其进行在线补偿和校正。 A corresponding relation between the object's parameters and the sensor output values is found by curved surface formulation. With the help of two dimension calibration and calibrated experiment,the coefficient in the regress equation under the condition of error-mean square is calculated in the light of minimum two multiplication principle. Thus, the object's (parameters) can be calculated out by known coefficient's multi-dimension regress equation once the sensor's output value measured. When the algorithm was applied to piezoresistive pressure sensor, it not only (benefits) temperature compensation but also helps non-linear rectifying.The accuracy of sensor can be reached (to 0.05*#%).Meanwhile,the sensor's self-RS232 interface is applied to on-line compensation and rectification.
作者 曲国福
出处 《传感器技术》 CSCD 北大核心 2003年第8期45-46,共2页 Journal of Transducer Technology
关键词 压阻式压力传感器 在线综合补偿 曲面拟合 温度补偿 非线性校正 piezoresistive pressure sensor curved surface formulation on-line comprehensive compensation
  • 相关文献

参考文献3

二级参考文献7

共引文献60

同被引文献68

引证文献16

二级引证文献99

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部