PREPARATION AND PROPERTIES OF Ni-Cr AND Fe-Cr-Al FILMS BY VACUUM EVAPORATION

PREPARATION AND PROPERTIES OF Ni-Cr AND Fe-Cr-Al FILMS BY VACUUM EVAPORATION

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摘要 Ni-Cr and Fe-Cr-Al films deposited on the Al2O3 substrate are studied by a method of vacuum evaporation in this paper. Influence of resistance value on density and evaporation parameters of the films reveals that the resistance of films and the adhesion of films to substrates are determined by the evaporation time and the substrate temperate under the condition of the maximum vacuity of 6.2×10-4 Pa, respectively. Ni-Cr and Fe-Cr-Al films deposited on the Al2O3 substrate are studied by a method of vacuum evaporation in this paper. Influence of resistance value on density and evaporation parameters of the films reveals that the resistance of films and the adhesion of films to substrates are determined by the evaporation time and the substrate temperate under the condition of the maximum vacuity of 6.2×10-4 Pa, respectively.

作者 X.W. Shi, Z.Y. Liu, B.C. Zeng and CM. LiInstitute of Materials Science & Technology, College of Mechanical Engineering, South China University of Technology, Guangzhou 510640, China

出处《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2003年第4期283-288,共6页 金属学报（英文版）

关键词 vacuum evaporation resistance of film vacuity vacuum evaporation, resistance of film, vacuity

分类号 TB43 [一般工业技术]

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Acta Metallurgica Sinica(English Letters)

2003年第4期

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PREPARATION AND PROPERTIES OF Ni-Cr AND Fe-Cr-Al FILMS BY VACUUM EVAPORATION

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