摘要
本文提出了一种简单而可行的数字位相分析新方法,适用于在激光数字波面干涉仪上进行高精度光学面形的实时绝对检测。用这种方法已建立了表面精度为λ/50峰谷值的标准光学平面,测量精度达λ/100以上。
A new method which is different from the traditional three-flat method for the absolute calibration of optical surface is described. The algorithm utilizes only one flat and allows the calibration of an optical surface to high degree of certainty with minimal data acquisition and reduction. This algorithm has been used on the interferometric data to fabricate and certify one φ80mm standard optical flat to λ/50 peak-to-valley quality.
出处
《计量学报》
CSCD
1989年第4期285-289,共5页
Acta Metrologica Sinica
