摘要
在对旋转对称系统进行研究的基础上,本文进一步探讨边界元素法(BEM)运用于三维非对称静电电子光学系统的数值分析以及适于程序设计的计算方法,并且编制成功了可用于设计与分析各种非对称的静电聚焦、偏转、宽电子束成像以及多极场等电子光学系统的应用软件。用Fortran语言编制的静电系统三维BEM分析设计通用程序,不但能够精确计算出系统电极上块状边界元的表面电荷密度、空间电位及电场分布,还能追迹计算不同方位、不同初始条件的电子轨迹,并计算出系统的成像参量、轴上和轴外的各种像差(包括描述系统非对称性质的像差)。通用程序已经过反复的优化,能够应用于各种非对称实际系统精确的分析设计。
Based on the study for rotational symmetric system, we investegated the numerical analysis for non-rotational symmetry 3D electrostatic system using the boundary element method (BEM) and developed a relevenl software package which is suitable for various non-rotational symmetry electrostatic electron-optical system. The general program of three dimvnensional BEM using Fortran language can be used to calculate the distribution of charge density and electrostatic fields. It can also be used to accuratelly calculate the imaging parameters and many kinds of aberrations on or off axis, including the parameters that describe the non-rotational symmetric features of 3D system.
出处
《红外技术》
CSCD
1992年第3期39-45,共7页
Infrared Technology
关键词
电子光学系统
边界元素法
CAD
软件
Computer aided design (CAD)
Electron optical system Boundary element method (BEM)
Applied software
Non-rotational symmetry system
