摘要
用离子自组装成膜技术制备了用作光波导器件的TiO2/SiO2复合薄膜,介绍了薄膜光学常数的测定方法,并研究了光波导的波导特性.结果表明随着TiO2含量的增大。光波导的折射率增加;但同时光波导损耗也将发生变化,一般TiO2占10％时,薄膜的波导损耗较低.在更高的含量范围内,必须使TiO2分散.
Thin films optical waveguide was fabricated by using of ionic self-assembled multilayers. Method for the determination of the optical constants was introduced. Its characterization was studied. Data show that the refractive index of optical waveguide increased as enhancement of TiO2 content. At the same time, waveguide loss became greater. When TiO2 content was 10%, waveguide loss was small. Otherwise TiO2 must be dispersed.
出处
《光电子技术与信息》
2003年第2期20-25,共6页
Optoelectronic Technology & Information
基金
湖北省自然科学基金(2001j2015)
关键词
离子自组装
纳米薄膜
光波导
光学常数
ionic self-assembly
nanometer thin film
optical waveguide
optical constants
