摘要
提出用无衍射光和环光栅重叠产生环状莫尔条纹的技术进行空间直线度测量的技术 ,给出了理论分析、仪器结构和原理实验 ,并对该方法在同时实现高分辨率和大量程直线度测量的可能性 ,以及抗激光器漂移等方面的特点进行了讨论。
A method of spatial straightness measurement by the method of super positioning the non-diffracting beam and ring grating to generate moire fringe is proposed. Theoretical analyses, instrument structure and principle experiment are given. Some characters, such as the possibility of maintain high sensitivity and large measurement range simultaneously, resistance to laser beam draft are discussed.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2003年第1期75-77,85,共4页
Chinese Journal of Scientific Instrument
基金
国家自然科学基金资助项目 (No.5980 50 0 6)
