摘要
本文在讨论低温泵抽气效率几种计算方法的基础上,提出了一种由Monte Carlo模拟结合Ballance方程计算低温泵抽气效率的方法,用这一方法对几种结构的致冷机低温泵进行了抽气效率计算,并与直接的Monte Carlo模拟或实验作了比较,认为Monte Carlo方法较直接Monte Carlo模拟简单,省时、省力;能清楚地反映出低温泵各元件对抽气效率影响。为低温泵的结构设计提供了一更有效的方法。
A method of calculating pumping efficiency of Cryopumps by combing Monte Carlo simulation with the Ballance equlalion is presenteel, based on discussion of sereral calculating methods. By calculations form Ballance- Monte Carlo method for Sereral cryopumps and conparation of calculating results with direct Monte Carlo simulation or experiments, We find that bath manpower and computer time canbe screed in this way, and the influence of the varions componets of cryopumps on the pumping efficiency can be easily investigated. A effective method for structured design of oryopump was supplied.
出处
《合肥工业大学学报（自然科学版）》
CAS
CSCD
1992年第3期34-40,共7页
Journal of Hefei University of Technology：Natural Science
关键词
低温泵
抽气效率
蒙特卡罗模拟
Cryopumps
pumping efficiency 5 Monte Carlo Simulation
