摘要
在40°和70°斜入射条件下,用100keV Ar^+、Ne^+轰击铜靶,Ar^+所产生的溅射原子角分布的溅射优先方向分别位于表面法线的两侧,溅射原子角分布对于表面法线明显不对称;而Ne^+所对应的溅射优先方向都位于表面法线方向,且溅射原子角分布对于表面法线是对称的。用级联碰撞理论分析了所得到的实验结果,并比较了Ar^+和Ne^+溅射机制上的不同。
The relations between angular distributions of sputtered atoms from a copper target and incident angles of 100 keV Ne+ and Ar+ have been investigated. The experimental results show that at incident angles of 40°and 70°,the preferential sputtering directions for the incidence of 100 keV Ar+ are on two sides of the surface normal respectively and the angular distributions are not symmetric about the surface normal; while for the incidence of 100 keV Ne+, the preferential sputtering directions are in the direction of surface normal and the angular distributions are symmetric about it. The experimental results are analyzed by using the cascade collision theory and the difference between Ar+ and Ne+ sputtering mechanisms is discussed.
出处
《核技术》
CAS
CSCD
北大核心
1992年第8期457-460,共4页
Nuclear Techniques
关键词
溅射
角分布
级联碰撞
入射角
Sputtering Angular distributions Recoil atoms Cascade collision
