摘要
利用机械和电学特性,推导出悬梁的位移与外加电压之间的关系,指出外加电压与扭臂厚度的3次方成正比,随上下电极之间距离的减小而降低。提出了一种具有倾斜下电极的驱动结构,该结构可以通过具有倾斜一定角度的(111)硅片的各向异性腐蚀得到。理论分析表明,倾斜下电极结构可以使阈值电压从60V降低到32V。
Using mechanical and electric characteristic, the relation between the translocation of cantilever and applied voltage is derived. The applied voltage is in direct proportion to the cube of the torsion beam thickness, and reduces with the shorten of preliminary distance between two adjacent electrodes.The drive structure with the inclined under electrode is proposed and fabricated using a certain inclined (111) silicon. Theoretical analysis indicates that the inclined under electrode can decrease the thresholdvoltage from 60 V to 32 V.
出处
《吉林大学学报（信息科学版）》
CAS
2003年第1期1-3,共3页
Journal of Jilin University（Information Science Edition）
基金
国家自然科学基金资助项目(69937010)
吉林省科学计划发展项目(20010319)
863计划资助项目(2002AA312023)
