摘要
在X射线衍射结果的基础上,采用极图法研究了AIN薄膜以(DO2)和(100)面的取向分布,发现在一定条件下制备的AIN(002)有很强的织构,并通过极图法来确定X射线衍射所无法确定的AIN(100)面择优取向薄膜中各晶粒c轴间的关系.
Based on the X-ray diffraction results, the textures of aluminium nitride films were investigated by using the pole-figure method. Aluminium nitride thin films prepared have a high (002) plane texture, and most of the c-axis of particles are parallel with the normal of the substrate. Aluminium. nitride thin films with (100) orientation are necessary, as they are applied to surface acoustic wave devices, and the pole-figure results are very useful for determining the c-axis of particles direction in the AlN (100) thin films.
出处
《无机材料学报》
SCIE
EI
CAS
CSCD
北大核心
2003年第2期490-494,共5页
Journal of Inorganic Materials
基金
教育部高等学校骨干教师资助计划项目
山西省青年科学基金(20011011)
湖北省科技攻关计划项目
关键词
氮化铝薄膜
极图
织构
aluminium nitride thin films
pole-figure method
texture
