摘要
提出了一种将高位移分辨率的压电陶瓷致动器与大驱动力的电磁致动器进行有机结合,实行优势互补的新方法。基于新原理研制的实验样机获得了较好的技术性能指标,即驱动力300N,刚度95N/μm;分辨率1nm;最大位移4μm。研究工作为大驱动力高刚度纳米致动开辟了一条新的途径。
A new method for nanometer actuating is presented,which combines the piezoelectric ceramic actuator with high displacement resolution and the electromagnetic actuator with large driving force. The experimental prototype based on the new mechanism has good technical performances:driving force of 300N,rigidity of 95N/μm,resolution of 1nm and maximum displacement of 4μm. The method gives a new way for the nanometer actuating with large driving force and high rigidity.
出处
《微细加工技术》
2003年第1期65-68,72,共5页
Microfabrication Technology
基金
国家自然科学基金资助项目 (598750 3 8)
