摘要
用透射电镜研究了Ti/TiN多层膜的显微形貌,并用X射线衍射与透射电镜的微束电子衍射相结合的方法获得多层膜的晶体结构、相组成及其空间分布的信息。证明了Ti/TiN多层膜有明显的分层结构,在每对相邻的Ti层和TiN层之间,均存在Ti_2N界面过渡层,在膜基界面处存在FeTi过渡层。多层膜的晶粒呈纤维状,其尺寸随单层厚度的降低而减小,此即多层膜的晶粒细化效应,它伴随着膜层硬度的增加。
The micromorphology of Ti/TiN multilayer films was studied by means of TEM. The crystallographic structure, phase composition and their spatial distribution were studied by X-ray diffraction in combination withμ-μ-diffraction in the TEM. A clearly visible layer structure is observed in Ti/TiN multilayer films. There are Ti_2N transition layers between the adjacent pair of Ti and TiN layers. There is a transition layer of FeTi between the film and the substrate. The grain size of the Ti/TiN multilayer films decreases with the decrease of the thickness of single layer which is called grain size refining effect of multilayer films and accompanied usually by hardness enhancement.
出处
《硅酸盐学报》
EI
CAS
CSCD
北大核心
1992年第5期404-409,共6页
Journal of The Chinese Ceramic Society
基金
国家大型自然科学基金课题
关键词
钛
氮化钛
膜
晶粒
显微构造
titanium/titanium nitride
multilayer film
microstructure
grain size refining effect
