摘要
用光学多道分析仪考察了低气压表面波型微波感氦偶等离子体的发射光谱.经过阿贝尔(Abel)反演变换后,得到了在各种气压和微波功率下此等离子体光谱辐射光强和激发温度的空间分布及其变化规律.讨论了此等离子体的激发机理.推算了其中亚稳态原子的空间分布情况.
Emission spectra of a low pressure helium microwave-induced plasma sustained by a surfatron were studied with OMA-3. After Abel inversion, the spatial distributions of emission spectrum intensities and excitation temperatures of the plasma were given out at different helium pressures and microwave powers. The exoitating mechanism of the plasma was discussed. The spatial distributions of metable population of the plasma were estimated.
出处
《光学学报》
EI
CAS
CSCD
北大核心
1992年第6期491-495,共5页
Acta Optica Sinica
基金
国家自然科学基金资助的项目
关键词
微波感偶
氦
等离子体
光谱
microwave induced
helium emission spectra
excitation temperature
helium metastable
spatial distribution characteristics.
