摘要
本文主要论述多片面阵CCD图像传感器焦平面光学拼接原理、结构设计及拼接精度,并给出了一个四片成2×2方阵的面阵CCD拼接样机结果。总像元数达1.42×10~6个,搭接精度1.5μm,共面精度5μm。拼接可大幅度地提高光电接收器的总像元数,并在实际工程中应用。
The focal plane assembly principle, construction and assembly accur-acy of multiple area CCDs are described in the paper, and the assembly resultsfor a 2×2 array of area CCD are given. Its total pixel numbers are1.42×10~6, assembly accuracy is less than 1.5μm. Common plane accuracy is5μm. The assembly can raise total pixel numbers of photodetector in largescale, and can be applied to practical engineering.
出处
《光电工程》
CAS
CSCD
1992年第4期23-29,共7页
Opto-Electronic Engineering