摘要
本文介绍了一种在平移过程中倾斜误差远小于秒级的光学精密平移器(以下简称精平移器)的工作原理及应用范围,介绍了该器件的作用原理以及附加的位移平衡装置的作用。对各项性能指标的检测方法及其检测结果也进行了阐述。
The operating principle and applications of optical precision transla-tional device whose slope error is far less than second magnitude in the transla-tional process are presented in the paper. The action of the additional displace-ment equilibrating device is also presented. The testing method for the deviceperformances and the testing results are described.
出处
《光电工程》
CAS
CSCD
1992年第1期1-7,共7页
Opto-Electronic Engineering
关键词
光学平移器
位移驱动器
传感器
Optical translational device, Micro-displacement actuator, Displacement sensors.
