摘要
文章重点分析了根据热释电效应工作的热释电探测器,包括主要组成结构,探测源、热绝缘结构和IC读出电路。从响应度、噪声等效温差NETD以及归一化探测度三个方面的因素分析了制造研究探测源应注意的问题,并且讨论了怎样选取合适的热释电材料。论述了选择热绝缘结构的原则,最后简单介绍了将红外光信号转化为电信号的流程,给出了等效电路。
This paper puts the emphasis on a type of infrared detectorpyroelectric uncooled focal plane array(FPA). The mechanism of the detector including the structure , detecting part, thermal isolation part and transfer circuit is presented. From responsibility、NETD and normalized detect degree ,the issues paid attention on in the fabrication is analyzed and the way how to choose the proper pyroelectric material is given. The principle of thermal isolation structure is discussed . The conversion process of infrared signal to electric signal is given ,as well as the equivalent circuit .
出处
《传感器世界》
2003年第2期15-20,共6页
Sensor World
