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SOI矩形光波导的有效折射率方法的研究 被引量:1

Study of effective-index method for SOI rectangular optical waveguides
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摘要 通过分析有效折射率方法在计算SOI矩形光波导中的误差,得出了从矩形波导的短边和长边分别计算波导的参数是不相同的结论,对于利用修正的有效折射率法求解波导参数有指导意义。 This paper analysis the errors from the calculation for SOI rectangular opticalwaveguide, reaching a conclusion that the parameters calculated from rectangular waveguide shortand long side are different.The conclusion is available for using effective-index method to analysisparameters of waveguides.
出处 《半导体技术》 CAS CSCD 北大核心 2003年第2期61-64,46,共5页 Semiconductor Technology
关键词 矩形光波导 SOI 有效折射率 光波场模式 rectangular optical waveguide effective-index method mode of light-wave field
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参考文献10

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二级参考文献1

  • 1赵策洲,半导体硅基材料及其光波导,1997年,225页

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