摘要
简介了喷墨打印制备薄膜技术的优势与特点,配制了SnO2前驱溶液墨水,并利用该技术在金叉指氧化铝基片上喷镀SnO2前驱溶液墨水,而制得了SnO2气敏薄膜元件。利用XRD分析了SnO2薄膜的晶体结构。通过控制喷打墨水的次数,方便地控制了最终薄膜的厚度。并初步探讨了喷墨打印次数对最终薄膜元件性能的影响。当薄膜只喷打一次时,具有极高的电阻值,而且灵敏度比较低。而随着喷打次数的增加,即薄膜厚度的提高,薄膜电阻也随之降低,并对乙醇具有较好的气敏性能。
*'Predominance and principle of inkjet printing thin films technique are reviewed.By this technique,SnO2 gassensing thin films were prepared expediently.SnO2 inks were prepared firstly,and then printed onto alumina substrate with interdigital gold electrodes.The thickness of the films was controlled by selecting different printing times.The structure of the films was investigated by XRD.The influence of printing times on SnO2 gas sensing characteristics was discussed.When printed only once,the films gained the highest resistance and lowest sensitivity.With increasing printing times,the sensitivity of SnO2 film increased and the resistance decreased.
出处
《传感器技术》
CSCD
北大核心
2003年第1期5-8,共4页
Journal of Transducer Technology
基金
国家重点基础研究发展规划(973)项目(G2000067205-4)
