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反射镜用Kelvin支承定位精度研究 被引量:3

Research on Accuracy of Relocation of Mirrors' Kelvin Mount
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摘要 针对ICF装置中大口径反射镜等光学元件快速更换和精确定位的要求 ,采用精确约束理论设计了Kelvin运动支承 ,建立了几何参数矩阵对结构的定位精度进行了理论计算 ,分析了产生误差的原因并对结构进行了改进 ,采用激光客观散斑法对样件的定位精度进行了测试 ,试验数据统计表明结构重复定位精度 (± 3σ) ;平移± 6 .2 μm ,转角± 2 .3″。 Applying Exact Constrain design principles,Kelvin mount for precision positioning large aperture mirrors in ICF facility was designed.This paper introduced theoretical method using geometric matrix of system to analyze repeatability and the result of the calculation.The accuracy of relocation of the mount was tested by using laser objective speckle method,accordingly,the methods to improve design was put forward.Experiments show the improved structure to be repeatable to ±6.2μm(axial), ±2.3'(tilt).
出处 《机械设计与研究》 CSCD 2002年第6期50-52,共3页 Machine Design And Research
基金 国家高科技研究发展计划专项经费资助
关键词 反射镜 Kelvin支承 定位精度 精确约束 客观散斑法 ICF装置 kelvin mount exact constrain accuracy of location laser objective speckle method
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参考文献5

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同被引文献22

  • 1余建军,黄启泰.超轻量化SiC反射镜有限元分析及应用[J].光学技术,2006,32(4):584-586. 被引量:3
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