摘要
本文在分析了采用接触式电极测量薄膜介质材料特性参数所存在问题的基础上,介绍了一种非接触式电极的测量原理和方法,并讨论了减小该方法测量误差的途径。
The measurement principle and method for characteristic parameters of the thin film dielectric material by using non-contact electrodes are presented. The way to reduce the errow in measurement are discussed.
出处
《电子器件》
CAS
1992年第1期35-37,共3页
Chinese Journal of Electron Devices
