摘要
结合原理说明了理想条件下的照明束与角度限制光阑可获得最佳成像反差 。
The optimal image contrast which can be got when the illumination beam and the angular limitation aperture are in ideal conditions is presented with their woking principles.In the nonideal conditions their influence on the image contrast and the debug method for the ideal conditions are discussed in detail.
出处
《微细加工技术》
2002年第3期17-22,共6页
Microfabrication Technology
