摘要
为研究表面等离激元纳米结构的微区域光学响应,本文研制了一套基于同轴转臂的微区域角分辨光谱测量系统。该系统设计了一种基于有限共轭构型的微区域远程激发与收集光路模型,实现了以32μm直径的微区域光斑入射;搭建了基于同轴转臂的角分辨机械系统,实现了6.9°至90°的大范围定向角度激发。性能测试表明,系统稳定性高,最小角度分辨率达0.12°。通过对一维光栅和二维周期纳米结构的反射光谱采集实验,进一步验证了系统的可靠性,证明了微区域光斑所带来的优势,为微纳结构的角分辨光谱表征提供了有效的技术手段。
To study the optical response of micro-area in surface plasmon nanostructures,we develop a micro-area angle-resolved spectroscopy measurement system based on a coaxial rotating arm.The system adopts a micro-area remote excitation and collection optical path model based on a finite conjugate configuration,enabling an incident micro-area spot with a diameter of 32μm.In addition,an angle-resolved mechanical system based on a coaxial rotating arm is constructed,realizing large-range directional angular excitation from 6.9°to 90°.Performance tests show that the system exhibits high stability,with a minimum angular resolution of 0.12°.Through the reflection spectrum collection experiments on one-dimensional gratings and two-dimensional periodic nanostructures,the reliability of the system is further verified.The results demonstrate the advantages of the micro-area spot,which provide an effective technical means for the angle-resolved spectroscopy characterization of micro and nanostructures.
作者
吴祖伟
高云
朱鹏飞
章文卓
王磊
WU Zu-wei;GAO Yun;ZHU Peng-fei;ZHANG Wen-zhuo;WANG Lei(School of Ceramic Engineering,Quanzhou Arts and Crafts Vocational College,Quanzhou 362500,China;Pen-Tung Sah Institute of Micro-Nano Science and Technology,Xiamen University,Xiamen 361102,China;University Key Laboratory of Intelligent Perception and Computing,Anqing Normal University,Anqing 246133,China)
出处
《中国光学(中英文)》
北大核心
2026年第2期277-287,共11页
Chinese Optics
基金
福建省中青年教师教育科研项目(科技类)(No.JAT241360)
安徽省教育厅青年科学项目(No.2025AHGXZK40354)
厦门市产学研项目(No.2024CXY0110)。
关键词
微区域光斑
角分辨光谱测量
谱学仪器
表面等离激元
micro-area light spot
angle-resolved spectroscopy measurement
spectroscopic instrument
surface plasmons
