摘要
谐振式压力传感器工作时,敏感器件和闭环接口电路的噪声会引起输出振荡频率的波动,导致传感器分辨率等性能下降。提出了一种谐振式压力传感器闭环驱动电路的相位噪声模型。在传统噪声模型基础上,考虑了幅度控制环路噪声通过可变增益放大器(VGA)调制到谐振频率附近,对1/f^(3)相位噪声产生的影响,以更准确地预测传感器噪声性能。基于该模型,分析了接口电路各模块的噪声贡献,并通过实际电路测试进行了验证,该模型可用于预测谐振式压力传感器的相位噪声,为谐振驱动接口电路的噪声性能优化提供指导。
When resonant pressure sensor is operating,the noise of the sensitive device and the closed-loop interface circuit may cause fluctuations in the output oscillation frequency,resulting in a degradation of the sensor resolution and other performance metrics.A phase noise model for the closed-loop driving circuit of resonant pressure sensor is proposed.On the basis of traditional noise model,the effect of amplitude control loop noise modulated to the vicinity of the resonant frequency through a variable gain amplifier(VGA)on the 1/f^(3) phase noise is taken into account,to predict the sensor noise performance more accurately.Noise contribution of each module of the interface circuit is analyzed based on the model,and it is verified through actual circuit testing.This model can be used to predict the phase noise of resonant pressure sensors and provide guidance for the optimization of the noise performance of resonant driving interface circuits.
作者
刘莹
殷树娟
尹韬
李严
刘剑
刘力源
LIU Ying;YIN Shujuan;YIN Tao;LI Yan;LIU Jian;LIU Liyuan(College of Applied Science,Beijing Information Science and Technology University,Beijing 100192,China;Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;School of Integrated Circuits,University of Chinese Academy of Sciences,Beijing 101408,China)
出处
《传感器与微系统》
北大核心
2026年第4期72-76,共5页
Transducer and Microsystem Technologies
基金
国家重点研发计划资助项目(2022YFB3204903)。
