摘要
石墨为辅助C源,以HMDSO-H_(2)为原料体系,采用化学气相沉积(CVD)法在单晶Si(100)基体表面一体化制备C-SiC复合涂层,使用扫描电子显微镜(SEM)、X射线衍射仪(XRD)、纳米压痕及划痕测试对复合涂层的表面形貌、相组成、力学性能和抗热震性能进行分析。结果表明:借助辅助C源可一体化沉积C缓冲层与SiC涂层,所制备的C-SiC复合涂层厚度为50μm(其中C缓冲层厚度为10μm),涂层致密,且与单晶Si基体结合良好,具有优异的抗热震性能,经过20次20~1200℃的循环热震后,复合涂层表面出现裂纹,但未发生翘曲或剥落现象。此外,纳米压痕显示复合涂层的硬度和弹性模量分别为23.25 GPa和272.3 GPa,划痕法测得该涂层与基体的结合力为29 N。
The C-SiC composite coating is integrally prepared on the surface of a single-crystal Si(100)substrate using chemical vapor deposition(CVD)with graphite as the extra-C source and HMDSO-H_(2)as the precursor system.The surface morphology,phase composition,mechanical properties,and thermal shock resistance of the composite coatings are analyzed by scanning electron microscopy(SEM),X-ray diffraction(XRD),nanoindentation and scratch testing.The results show that the extra-C source enable simultaneous deposition of a carbon buffer layer and SiC coating.The prepared C-SiC composite coating exhibits a total thickness of 50μm(including a 10μm-thick C buffer layer),dense structure,and excellent adhesion to the single-crystal Si substrate.The coating shows outstanding thermal shock resistance,with surface cracks emerging after 20 thermal cycles between 20℃and 1200℃,but no warping or delamination occurs.The nanoindentation reveals that hardness and elastic modulus of the composite coating are 23.25 GPa and 272.3 GPa,respectively,while the scratch testing indicates an interfacial adhesion strength between the coating and substrate is 29 N.
作者
侯文康
景玮晨
熊天英
唐明强
HOU Wenkang;JING Weichen;XIONG Tianying;TANG Mingqiang(School of Materials Science and Engineering,University of Science and Technology of China,Shenyang 110016,China;Institute of Metal Research,Chinese Academy of Sciences,Shenyang 110016,China)
出处
《材料工程》
北大核心
2026年第3期222-228,共7页
Journal of Materials Engineering
基金
国家重点研发计划资助项目(2023YFB3711100)。
关键词
碳化硅涂层
化学气相沉积
结合力
缓冲层
SiC coating
chemical vapor deposition
adhesion strength
buffer layer
