摘要
随着半导体硅片制造工艺与技术的发展,对其亚表面损伤的高精度检测提出了更高要求。尽管非线性超声Lamb波具有高灵敏度和无损检测的优势,但其信号模式与硅片亚表面微裂纹特征的对应关系仍不明确。该文通过数值仿真,建立了Lamb波在含亚表面微裂纹硅片中传播的有限元模型,选取相速度匹配的S 0-s 0(基频和二倍频)Lamb波模式对,研究了二次谐波超声非线性系数与传播距离及亚表面微裂纹特征的关系。结果表明:随超声波在硅片中传播距离的增加,其超声非线性系数呈现递增趋势,而当材料中存在亚表面微裂纹时,超声非线性系数的幅值将显著提升。相对超声非线性系数随着微裂纹的数量、长度、密度以及亚表面损伤层厚度的增加而提升;在相同密度下,相对超声非线性系数对微裂纹长度的敏感性高于数量变化。研究结果验证了非线性超声Lamb波检测硅片亚表面微裂纹的有效性。
In recent years,advances in semiconductor silicon wafer manufacturing have increased the demand for accurate detection of subsurface defects.When inspecting microcracks far smaller than the wavelength,nonlinear Lamb waves offer distinct advantages such as high efficiency,high sensitivity,and nondestructive evaluation.However,their application in silicon wafer inspection remains limited,partly due to the unclear relationship between nonlinear Lamb wave signal characteristics and subsurface microcrack features.In this work,finite element models of Lamb wave propagation in silicon wafers with subsurface microcracks are established.The Lamb wave mode pair S 0-s 0,satisfying phase-velocity matching,is employed to investigate how the acoustic non linearity parameter(ANP)of the second-harmonic correlates with propagation distance and microcrack characteristics.Simulation results indicate that the ANP increases with propagation distance,and the presence of subsurface microcracks significantly amplifies its amplitude.Moreover,the relative ANP increases with the number,length,density of subsurface microcracks,and subsurface damage layer thickness.Additionally,for a given density,the length of subsurface microcracks has a more significant influence on the relative ANP than their number.This study illustrates the potential of nonlinear Lamb waves for detecting subsurface microcracks in silicon wafers and provides simulation-based validation for its feasibility.
作者
胡兰艺
尹莘新
许才彬
赵友选
邓明晰
HU Lanyi;YIN Shenxin;XU Caibin;ZHAO Youxuan;DENG Mingxi(College of Aerospace Engineering,Chongqing University,Chongqing 400044,China)
出处
《陕西师范大学学报(自然科学版)》
北大核心
2026年第2期11-18,共8页
Journal of Shaanxi Normal University:Natural Science Edition
基金
国家自然科学基金(12474437,12134002)
重庆市自然科学基金(CSTB2024NSCQ-MSX1074)。
关键词
非线性超声
LAMB波
硅片
亚表面微裂纹
数值仿真
nonlinear ultrasonic
Lamb wave
silicon wafer
subsurface microcrack
numerical simulation
