摘要
采用小掠射角X射线衍射(GXRD)、扫描电镜(SEM)、透射电镜(TEM)及纳米压痕仪等研究了M50钢表面等离子体基离子注入(PBII)碳氮共渗层的微观结构及硬度,并对碳氮共渗层的横截面、表面结构以及回火马氏体亚结构进行了分析。结果表明:经过PBII碳氮共渗处理后,随着注渗温度的升高,渗层厚度先增加后降低,渗层中主要含有回火马氏体相、少量Fe_(3)C和CrN,并在晶粒内部或沿晶界弥散析出化合物颗粒,在400℃PBII处理后,形成了连续的化合物层;注渗后虽然试样的晶界并未消失,但原始的回火马氏体已转变为微晶或微孪晶态;TEM和高分辨透射电镜(HRTEM)分析结果表明,离子注入会导致非晶区的形成以及堆垛缺陷;硬度测试表明,经过PBII处理的试样表面硬度均明显提高,最高硬度达到了21 GPa,比基体硬度高9 GPa。
The microstructure and hardness of plasma-based ion implantation(PBII)carbonitrided layer on the surface of M50 steel were studied using small grazing-angle X-ray diffraction(GXRD),scanning electron microscopy(SEM),transmission electron microscopy(TEM),and nanoindentation instrument.The cross-section images,surface structure,and tempered martensite substructure of the carbonitrided layer were analyzed.The results show that after PBII carbon-nitrogen co-infiltration treatment,with the increase of treatment temperature,the thickness of the carbonitrided layer first increases and then decreases.The carbonitrided layer mainly consists of tempered martensite,a small amount of Fe_(3)C and CrN,and compound particles are dispersed and precipitate inside the grains or along the grain boundaries.After PBII treatment at 400℃,a continuous compound layer is formed.After PBII treatment,although the grain boundaries of the sample do not disappear,the original tempered martensite has transformed into microcrystals or micro-twinned structures.The analysis results of TEM and high-resolution transmission electron microscopy(HRTEM)show that ion implantation can lead to the formation of amorphous regions and stacking defects.The hardness test shows that the surface hardness of the samples treated with PBII is significantly improved,with the highest hardness reaching 21 GPa,which is 9 GPa higher than the hardness of the substrate.
作者
张志豪
李忠文
唐光泽
马欣新
ZHANG Zhi-hao;LI Zhong-wen;TANG Guang-ze;MA Xin-xin(School of Materials Science and Engineering,Shanghai University of Engineering Science,Shanghai 201620,China;State Key Laboratory of Metal Precision Processing,Harbin Institute of Technology,Harbin 150001,China)
出处
《材料热处理学报》
北大核心
2026年第2期190-195,共6页
Transactions of Materials and Heat Treatment
基金
上海Ⅲ类高峰学科-材料科学与工程。
关键词
M50钢
等离子体基离子注入碳氮共渗
微观结构
M50 steel
plasma-based ion implantation carbon-nitrogen co-infiltration
microstructure
