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激光诱导空泡微冲压成形铜箔实验研究

Experimental Study on Laser Induced Cavitation Micro-stamping Forming of Copper Foil
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摘要 利用激光诱导空泡产生的等离子体冲击波、空泡溃灭冲击波和微射流,将其引入微模具对铜箔进行微冲压成形;分别采用不同激光焦点位置、能量和脉冲次数对铜箔进行微冲压成形实验,对铜箔冲压后的凹坑深度、烧蚀情况进行了对比研究,并利用高速摄影仪对激光诱导空泡冲压成形机理进行了分析。结果表明,激光焦点位置、能量对冲压成形后的凹坑深度影响显著,同时选择合适的激光焦点位置和能量,能够实现连续多次无烧蚀冲压成形。微冲压成形过程中激光等离子体冲击波、空泡溃灭冲击波和微射流都将对冲压产生作用,当激光焦点距离工件较远时,激光等离子体冲击波、空泡溃灭冲击波和微射流三者对工件的冲压作用未发现显著区别;当激光焦点距离工件较近时,激光等离子体冲击波的冲压作用强于空泡溃灭冲击波和微射流。 In this study,plasma shock waves,cavitation collapse shock waves,and micro-jets generated by laserinduced cavitation are utilized for the micro-stamping of copper foil within micro-molds.Experiments were conducted to investigate the effects of laser focal positions,energies,and varying numbers of pulses.The depths of the indentations and the ablation conditions of the stamped copper foil were comparatively analyzed.Furthermore,the mechanism of laserinduced cavitation stamping forming was examined using high-speed photography.The results demonstrate that the depth of the indentations is significantly influenced by the laser focal position and energy.Additionally,continuous multiple stampings without ablation were achieved by selecting appropriate laser focal positions and energy.Through analysis,it is revealed that during the micro-stamping process,contributions are made by laser plasma shock waves,cavitation collapse shock waves,and micro-jets,when the laser focal positions are far from the workpiece,no significant difference was observed in the stamping effect exerted by the laser plasma shock waves,cavitation collapse shock waves,and micro-jets on the workpiece.When the laser focal positions are close to the workpiece,the stamping effect produced by the laser plasma shock waves is found to be stronger than that generated by the cavitation collapse shock waves and micro-jets.
作者 陈铁牛 陈海涛 丁首斌 曾文平 陈立林 CHEN Tieniu;CHEN Haitao;DING Shoubin;ZENG Wenping;CHEN Lilin(School of Intelligent Manufacturing,Guangdong Polytechnic,Foshan 528041,China)
出处 《电加工与模具》 北大核心 2026年第1期62-69,75,共9页 Electromachining & Mould
基金 广东省普通高校特色创新类项目(2021KTSCX209) 广东省教育科研项目(高等教育科学专题)(2022GXJK466)。
关键词 激光空泡 微冲压成形 高速摄影观测 等离子体冲击波 laser cavitation micro-stamping forming high-speed photography observation plasma shock wave
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