摘要
针对MEMS场景下磁通门仿真建模过于简化的问题,提出考虑各向异性磁芯耦合特性的系统性仿真方法。通过采用非线性Jiles-Atherton(J-A)模型和基于张量能量运算的磁滞回线建模方法,得到耦合了磁材料复杂特性的磁芯模型。并探究不同参数对传感器性能的影响。结果显示:该仿真方法可有效反映各向异性磁芯材料对磁通门工作特性的影响,验证了激励电流、磁芯厚度和线圈截面积与传感器性能的关系,可为MEMS场景下的磁通门传感器有限元仿真研究及实物制作提供有效参考。
Aiming at the problem of oversimplified fluxgate simulation modeling in MEMS scenarios,a systematic simulation method considering the coupling characteristics of anisotropic magnetic cores is proposed.By adopting the nonlinear Jiles-Atherton(J-A)model and the hysteresis loop modeling method based on tensor energy operation,the core model coupled with the complex characteristics of magnetic materials is obtained.Moreover,the effects of different parameters on the sensor performance are explored.The results show that the simulation method can effectively reflect the influence of anisotropic core material on the operating characteristics of fluxgate,and verify the relationship between the excitation current,core thickness and coil cross-sectional area and the sensor performance,which can provide an effective reference for the finite-element simulation study of fluxgate sensors in MEMS scenarios and the fabrication of physical objects.
作者
马朝祥
吕阳
陆玲霞
于淼
朱格民
MA Zhaoxiang;LUYang;LU Lingxia;YU Miao;ZHU Gemin(College of Electrical Engineering,Zhejiang University,Hangzhou 310027,China;Ningbo CRRC Times Transducer Technology Co Ltd,Ningbo 315021,China)
出处
《传感器与微系统》
北大核心
2026年第2期48-54,共7页
Transducer and Microsystem Technologies
基金
宁波市重点研发计划暨“揭榜挂帅”项目(2023Z153)。
