摘要
面向均热板超薄化与高热流密度散热需求,吸液芯需在受限腔体内兼顾高毛细压与低流阻。激光微纳加工凭借极高峰值功率密度及形貌精确可控等优势,能够在金属表面原位构筑兼具高毛细力与高渗透性的复合结构,成为提升吸液芯毛细极限与传热性能的重要手段。本文系统综述了国内外吸液芯表面功能结构的研究进展,重点阐述了激光微纳加工在热功能结构制备中的应用现状。深入分析了激光能量密度、扫描策略等关键工艺参数对微纳形貌演变规律及表面浸润性的调控机制,阐明了多级复合结构对毛细力与渗透率的协同优化机理,并进一步揭示了其强化相变传热的作用。通过系统对比激光微纳加工与增材制造、电化学沉积及机械加工等工艺,论证了激光微纳加工技术在加工精度、尺度可控性及集成适配性等方面的显著优势。针对大面积加工一致性、长期运行可靠性及多材料体系兼容性等工程化应用瓶颈,探讨了激光与化学复合加工等潜在的技术演进路径。最后,对激光微纳加工技术在高性能、柔性相变散热器件领域的发展前景进行了展望,旨在为新一代高性能电子产品热管理系统的研发提供理论支撑与工艺参考。
With the rapid advancement of portable electronic products toward high integration,superior performance,and extreme miniaturization,chip power consumption has continued to escalate,leading to significantly increased localized heat fluxes and increasingly severe thermal hotspot challenges.Currently,two-phase heat transfer technology based on the latent heat of working fluids has emerged as a pivotal strategy for high-heat-flux dissipation.As a representative two-phase cooling device,the vapor chamber(VC)facilitates high-efficiency heat spreading through a vapor-liquid phase-change cycle.However,the aggressive compression of internal space in ultra-thin VCs drastically escalates fluidic flow resistance and weakens overall heat transfer performance.As the core component providing the necessary capillary driving force for liquid return,the wick must be engineered with micro-and nano-scale architectures to achieve a high capillary limit,thereby satisfying the escalating cooling demands of next-generation electronics.Laser micro-nano processing,characterized by its ultra-high peak power density,negligible heat-affected zone,and exceptional control over multi-scale morphologies,has become an indispensable methodology for wick fabrication.This technique enables the in-situ fabrication of hierarchical structures directly on metallic substrates,effectively reconciling the inherent contradiction between high capillary pressure and favorable permeability.The work aims to provide a systematic review of Chinese and international research progress in functional wick surfaces,specifically focusing on the application status of laser micro-nano processing in the preparation of advanced thermal structures.A detailed analysis is provided regarding the modulation mechanisms of key process parameters,including laser energy density,scanning strategies,pulse repetition rates,and hatching distances,on the evolution of micro-nano topographies and surface wettability.The review elucidates the synergistic optimization mechanism of hierarchical structures,where micro-scale features serve as low-resistance conduits for bulk liquid transport,while sub-micron textures provide the necessary interfacial curvature to maximize capillary lift.Furthermore,the underlying physical principles of enhanced phase-change heat transfer are revealed,detailing how laser-engineered surfaces promote thin-film evaporation,increase the density of active nucleation sites,and delay the"dry-out"phenomenon at high heat fluxes.Through a rigorous comparative analysis between laser micro-nano processing and conventional techniques,such as additive manufacturing,electrochemical deposition,chemical etching,and traditional mechanical micro-machining,the superior advantages of laser technology in terms of fabrication precision,multi-scale controllability,and integration adaptability are demonstrated.Specifically,traditional mechanical micro-processing,such as mechanical scribing,is typically restricted to producing large-scale features(often 100μm and above),and the significant mechanical stress exerted during the process renders ultra-thin substrates highly susceptible to undesirable deformation.While chemical etching is capable of producing micron-scale grooves,its practical deployment is severely hindered by low processing efficiency,substantial environmental pollution due to toxic byproducts,and poor control over dimensional precision.In contrast,leveraging its non-contact and high-energy-density characteristics,laser micro-nano processing enables the in-situ fabrication and monolithic integration of complex wick patterns without compromising the mechanical integrity of thin metallic shells.The focus is placed on the unique capability of laser technology to overcome the stringent fabrication constraints within ultra-thin cavities(≤1.0 mm),ensuring both high geometric fidelity and structural robustness.Addressing engineering bottlenecks such as large-area processing consistency,long-term operational reliability under repeated thermal cycling,and compatibility across diverse material systems,the potential technical evolution paths are investigated,such as hybrid manufacturing combining laser ablation with chemical etching or oxidation.Finally,the prospects of laser micro-nano processing in the domain of high-performance and flexible phase-change heat dissipation devices are envisioned.This review aims to provide a comprehensive theoretical framework and practical process references for the research and development of next-generation thermal management systems in the electronics industry.
作者
贾友凯
曹佐
钟文洲
王纪祥
黄亚军
谢小柱
JIA Youkai;CAO Zuo;ZHONG Wenzhou;WANG Jixiang;HUANG Yajun;XIE Xiaozhu(Laser Micro/Nano Processing Lab,School of Electromechanical Engineering,Guangdong University of Technology,Guangzhou 510006,China;Department of Experiment Teaching,Guangdong University of Technology,Guangzhou 510006,China)
出处
《表面技术》
北大核心
2025年第24期50-69,共20页
Surface Technology
基金
广东省重点研发项目(2023B0909030003-3)
广州市科技计划项目(2025A04J3758)
国家自然科学基金(52075103)。
关键词
激光加工
表面热功能结构
相变传热
吸液芯
均热板
laser processing
thermal functional surface structures
phase-change heat transfer
wick
vapor chamber
