摘要
扫描电子显微镜(SEM)凭借高分辨率、大景深、快速成像等优势,广泛应用于材料学和生物学研究中的微观表征。尽管SEM图像呈现一定的立体感,其本质仍是二维图像,缺乏直接的三维信息。为实现更直观的视觉表达并精确测量样品表面特性,基于二维SEM图像的三维表面重建已成为显微视觉领域的核心课题。本文系统综述该领域近年来的研究进展,涵盖设备开发、算法优化及应用探索,重点分析单视角与多视角两种三维重建方法的特点与进展。同时,剖析当前技术瓶颈,并展望未来研究方向,以期推动该领域的进一步发展。
The scanning electron microscope(SEM)is widely used in materials science and biology research due to its high resolution,large depth of field,and fast imaging capabilities.Although SEM images exhibit a sense of three⁃dimensionality,they are inherently two⁃dimensional and lack direct three⁃dimensional information.To achieve more intuitive visualization and accurate measurement of surface features,three⁃dimensional surface reconstruction from two⁃dimensional SEM images has become a key research focus in microscopic imaging.This paper presents a comprehensive review of recent advances in this field,including developments in instrumentation,algorithm optimizations,and emerging applications.Particular emphasis is placed on the feature and progress of two three⁃dimensional reconstruction methods:Single⁃view and multi⁃view.Current technical challenges are also discussed,along with future research prospects,to support continued progress in this field.
作者
张雪成
张跃飞
孟文超
张泽
ZHANG Xuecheng;ZHANG Yuefei;MENG Wenchao;ZHANG Ze(Polytechnic Institute,Zhejiang University,Hangzhou Zhejiang 310015;School of Materials Science and Engineering,Zhejiang University,Hangzhou Zhejiang 310027;College of Control Science and Engineering,Zhejiang University,Hangzhou Zhejiang 310027,China)
出处
《电子显微学报》
北大核心
2025年第6期714-725,共12页
Journal of Chinese Electron Microscopy Society
基金
国家科技重大专项资助项目(No.J2019-III-0008-0051)
关键词
扫描电子显微镜
三维重建
光度立体法
运动恢复结构
原位三维成像
scanning electron microscope
three⁃dimensional reconstruction
photometric stereo
structure from motion
in⁃situ three⁃dimensional imaging
