摘要
提出了一种具有一维光子晶体纳米束腔的波导型外腔半导体激光器,通过将反射式半导体光放大器与硅基纳米束腔进行对接耦合,实现了混合集成激光器。纳米束腔具有高品质因子、小模式体积和紧凑的尺寸,是构建窄线宽、可调谐外腔半导体激光器的核心无源器件。我们建立了针对纳米束腔的波导型外腔激光器综合仿真模型,优化了模斑转换器以实现反射式半导体光放大器和硅基单模线波导的高效耦合,并进一步讨论了模斑转换器插入损耗、外腔反射率对外腔激光器激射性能的影响。我们发现,改变纳米束腔所处环境折射率可以实现激光波长的高效调谐,调谐效率仿真值为120 nm/RIU。所设计的外腔激光器的纳米束腔尺寸仅为0.7μm×20μm,线宽仿真值为30 kHz。
A waveguide-based external cavity diode laser(ECDL)with one-dimensional photonic crystal nano-beam cavity is proposed.In the design,the reflective semiconductor optical amplifier(RSOA)is hybrid integrated with a silicon-based nanobeam cavity through butt-coupling method.The nanobeam cavity has a high quality factor,small mode volume and compact footprint.It is the critical passive device to build the narrow-linewidth tunable wave-guide-based ECDL.We build a comprehensive simulation model to analyze the optoelectronic response of the wave-guide-based ECDL with a nanobeam cavity.The spot size converter(SSC)is optimized to achieve highly efficient butt-coupling between the RSOA and the single-mode silicon channel waveguide.And the influences of the insertion loss of the SSC and the reflectivity of the nanobeam cavity on the performance of the ECDL are discussed.By chang-ing the refractive index of the environment in which the nanobeam cavity is placed in the simulation,we can tune the wavelength of the ECDL efficiently at a sensitivity of 120 nm/RIU.The size of the nanobeam in the designed ECDL is only 0.7μm×20μm and the simulated linewidth is 30 kHz.
作者
胡清波
杨一粟
童彬彬
熊伟宏
严英占
朱刚毅
杨大全
HU Qingbo;YANG Yisu;TONG Binbin;XIONG Weihong;YAN Yingzhan;ZHU Gangyi;YANG Daquan(State Key Laboratory of Information Photonics and Optical Communications,Beijing University of Posts and Telecommunications,Beijing 100876,China;Information Science Academy of China Electronics Technology Group Cooperation,Beijing 100144,China;National Key Laboratory of Integrated Circuits and Microsystems,Beijing 100042,China;College of Integrated Circuit Science and Engineering(College of Industry-Education Integration),Nanjing University of Posts and Telecommunications,Nanjing 210003,China;Zhenjiang NJUPT Research Institute,Zhenjiang 212000,China)
出处
《发光学报》
北大核心
2025年第12期2353-2361,共9页
Chinese Journal of Luminescence
基金
国家重点研发计划(SQ2023YFB2805600)
北京邮电大学大学生研究创新基金
中央高校基本科研业务费专项资金(BUPT,2024ZCJH14)
国家自然科学基金(12474372,61904016)
北京市自然科学基金(Z210004)
北京邮电大学信息光子学与光通信全国重点实验室项目(IPOC2024ZR01)
北京市科技新星计划项目(20230484433)
信息光子学与光通信全国重点实验室(北京邮电大学)开放基金。
关键词
外腔半导体激光器
纳米束
硅基光子学
混合集成
external cavity diode laser(ECDL)
nanobeam
silicon photonics
hybrid integration
