摘要
针对微柱状电极逐层扫描放电加工电极横截面尺寸微小、抗干扰能力较差的问题,提出一种电火花线切割与热扩散焊组合制备三维叠层微电极方法。通过建立三维叠层微电极间隙流场仿真模型,研究三维叠层微电极回退距离和移动速度对加工屑排出的影响,以及队列电极中电极数量对微结构加工精度的影响。结果表明:当电极回退距离大于微型腔深度且移动速度为2 mm/s时,有利于加工屑排出且提高了加工过程的稳定性。基于优化参数,采用包含3个微电极组成的队列电极在304不锈钢表面进行粗/精加工,获得形貌良好的三维微结构,最大尺寸误差为12μm,深度误差在4μm以内。
To address the issue of poor anti−interference capability caused by the small cross-sectional size of micro-cylindrical electrodes in layer-by-layer scanning EDM,a method combining WEDM and thermal diffusion welding was proposed for fabricating queue 3D laminated microelectrodes.A simulation model of the gap flow field for the 3D laminated microelectrode was established to investigate the effects of retraction distance and moving speed on debris exclusion,as well as the influence of the number of electrodes in the queue on machining accuracy.The results indicate that when the retraction distance exceeds the micro-cavity depth and the moving speed was 2 mm/s,debris exclusion was improved,leading to enhanced machining stability.Using a queue electrode composed of three microelectrodes under optimized parameters,roughing and finishing processes were performed on 304 stainless steel,resulting in wellformed 3D microstructures with a maximum size error of 12µm and a depth error within 4µm.
作者
沈昊天
雷建国
程蓉
伍晓宇
王金金
SHEN Haotian;LEI Jianguo;CHENG Rong;WU Xiaoyu;WANG Jinjin(Shenzhen University of Information Technology,Shenzhen 518172,China;Guangdong Provincial Key Laboratory of Micro/Nano Optomechatronics Engineering,Shenzhen University,Shenzhen 518060,China)
出处
《电加工与模具》
北大核心
2025年第6期6-11,共6页
Electromachining & Mould
基金
广东省自然科学基金项目(2023A1515011785)
广东普通高校特色创新项目(2023KTSCX324)
深圳市高等院校稳定支持计划项目(20231120184926001、20220817163729003)。
