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MEMS微弹簧高过载条件下的动态响应 被引量:1

Dynamic Response of MEMS Micro-spring under the Condition of High Overload
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摘要 为探究MEMS微弹簧在高过载条件下的动态响应规律,采用理论求解和仿真验证的方法,建立了微弹簧系统模型,通过计算机程序求解出运动行程与运动时间之间的函数关系,进而得到了运动速度、加速度与运动时间之间的函数关系。高过载条件下微弹簧会受到相应环境力,以S型微弹簧为例,研究结果表明:在不同的尺寸设计下,当微弹簧刚度足够大时,微弹簧在受力后的短时间内达到简谐振动最大行程,振幅较小导致微弹簧及滑块被拉伸的距离有限,无法到达闭锁位置;当微弹簧刚度设计适中时,微弹簧可在微秒级时间下运动到指定位置闭锁。应用于微小型引信时,在微尺度下,各刚度下的S型微弹簧单独使用时一般不能达到常规引信要求的延期解除隔离时间,因此微弹簧通常与其他元器件配合使用从而达到能量转换和延期解除隔离的目的。 In order to study the dynamic response of the MEMS micro-spring under the condition of high overload,the system model of micro-spring based on theoretical analysis and simulation was established.By solving the differential equation of the dynamic response of micro-spring under high overload with computer program,the relation between the displacement and the time was obtained,as well as the relation between the velocity or acceleration and the time.The micro-spring was subjected to the corresponding environmental force under high overload.Taking the“S”type micro-spring as an example,the paper showed that the micro-spring and mass block move a distance smaller than the locked position in a short time when the stiffness was large enough.When the stiffness of micro-spring was decreased to an appropriate value,the micro-spring could reach to the designated position in microsecond and be locked.However,under the microscale level,the motion time was still far less than the required arming delay time of the regular fuze.Therefore,the micro-spring should be applied together with other components in the safety and arming device to achieve the required energy conversion and arming delay.
作者 谢雨珊 陈正光 张英豪 果家隆 王亚斌 刘扬 XIE Yushan;CHEN Zhengguang;ZHANG Yinghao;GUO Jialong;WANG Yabin;LIU Yang(School of Mechatronical Engineering,Beijing Institute of Technology,Beijing 100081,China;Science and Technology on Electromechanical Dynamic Control Laboratory,Beijing 100081,China)
出处 《探测与控制学报》 北大核心 2025年第6期46-55,共10页 Journal of Detection & Control
基金 机电动态控制重点实验室开放课题基金项目(6142601220410)。
关键词 MEMS微弹簧 二阶系统 微弹簧动态响应分析 有限元数值模拟 MEMS micro-spring quadratic system dynamic response of micro-spring finite element analysis
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