摘要
针对射频微机电系统(RF MEMS)开关的可靠性评价问题,结合其典型结构及工作原理,分析了工艺、机械、环境等因素对开关可靠性的影响。在此基础上,提出了该开关的可靠性试验项目,以及筛选、鉴定检验、质量一致性检验的质量评价程序与方法。典型开关样品的试验验证结果表明,该评价要求程序有效、合理。本研究可为RF MEMS开关的质量考核与可靠性提升提供关键依据。
Focusing on the reliability evaluation of Radio Frequency Micro-Electro-Mechanical System(RF MEMS)switches,this paper analyzes the impacts of process,mechanical,environmental and other factors on switch reliability based on their typical structures and working principles.On this basis,it proposes the reliability test items for such switches,as well as the quality evaluation procedures and methods for screening,qualification inspection,and quality consistency inspection.Test verification results of typical switch samples demonstrate that the proposed evaluation requirements and procedures are effective and reasonable.This study can provide a key basis for the quality assessment and reliability improvement of RF MEMS switches.
出处
《信息技术与标准化》
2025年第11期73-77,84,共6页
Information Technology & Standardization
关键词
射频
微机电系统
开关
质量评价
Radio Frequency(RF)
Micro-Electro-Mechanical System(MEMS)
switch
quality evaluation
