摘要
类金刚石薄膜(DLC)因其卓越的耐磨性、低摩擦因数、高硬度等特点,在汽车工业、航空航天、机械制造等领域得到广泛的应用。为了延长机械零部件在磨损、腐蚀等环境下的服役寿命,目前开发了多种先进的DLC薄膜性能调控技术,实现了对机械零部件性能的强化。研究领域的相关内容和方法正在不断地丰富和完善,但目前缺少这类综述论文,此类论文对于引领整个行业和领域的发展显得尤为重要。从DLC薄膜的制备技术、工艺参数优化、元素掺杂改性、梯度构筑和表面织构化等方面,系统总结国内外相关耐磨性能的研究工作。大量研究发现,适当调控工艺参数可以提高DLC薄膜的硬度和耐磨性;元素掺杂可以改善DLC薄膜的结构和性能,实现高弹性恢复、低摩擦磨损;梯度构筑可以增强DLC薄膜的附着力、硬度、抗磨损性;表面织构化可以改善DLC薄膜的摩擦学性能。因此,通过精细调控工艺参数、掺杂元素和含量、表面结构设计等,可以有效改变DLC薄膜的微观结构,增强其附着力、硬度和抗磨损性,这些改进有助于延长机械零部件在严苛条件下的使用寿命。通过全面调整DLC薄膜的制造工艺及其他策略,以实现其耐磨性能的全面提升,填补了行业内对DLC薄膜性能优化方面系统性综述的空缺,对相关技术领域的进一步发展具有重要的指导性意义。
Diamond-like carbon(DLC)films are renowned for their exceptional wear resistance,low friction factor,and high hardness,which have led to their widespread application in the automotive,aerospace,and mechanical manufacturing industries.Various advanced techniques have been developed to control the properties of DLC films and prolong the service lives of mechanical components under wear and corrosion conditions,thereby enhancing their performance.The body of research in this field is continuously being enriched and refined.However,there is a scarcity of comprehensive review papers,which are crucial for guiding the development of the entire industry and academic domain.In response to this need,this study systematically summarizes the existing research on the wear-resistant properties of DLC films from both domestic and international perspectives,focusing on aspects such as preparation technology,process parameter optimization,modification through element doping,gradient construction,and surface texturing.A comprehensive aggregation of the research results strongly suggests that the meticulous adjustment of the process parameters is indispensable for marked enhancements in the hardness and wear resistance of DLC coatings.Element doping can improve the structure and properties of DLC films to achieve high elastic recovery as well as low friction and wear;gradient construction can strengthen the adhesion,hardness,and wear resistance of DLC films;and surface texturing can enhance the tribological performance of DLC films.Therefore,by finely controlling the process parameters,types and contents of doping elements,and design of surface structures,the microstructures of DLC films can be effectively altered to achieve an increase in the wear resistance,a reduction in the friction coefficient and wear rate,and enhanced adhesion,hardness,and wear resistance.These improvements are beneficial for extending the service lives of mechanical components under severe operating conditions.By comprehensively adjusting the manufacturing processes and other strategies for DLC films,this study achieves an overall upgrade in wear-resistant performance,thus filling the void in the industry for a systematic review on the optimization of DLC film properties.The research summarized in this study covers a range of deposition techniques,including physical vapor deposition(PVD),chemical vapor deposition(CVD),and plasma-enhanced chemical vapor deposition(PECVD),which are vital for achieving the desired film properties.The optimization of process parameters,such as the substrate temperature,deposition pressure,ion energy,and gas flow rates,is discussed,as all these parameters are critical for controlling the structure and performance of the film.The role of element doping in modifying the properties of films is investigated,with a focus on the use of transition metals,rare earth elements,and other alloying agents to enhance certain characteristics of DLC films.Furthermore,the study explores the concept of gradient construction,where the compositions and structures of films are varied throughout their thicknesses to create a gradient that can improve adhesion to the substrate and enhance mechanical properties.The study also addresses surface texturing,which involves the creation of micropatterns on the surface of a film to reduce friction and wear,which is a feature of particular importance for applications in which tribological performance is critical.In conclusion,this study provides a thorough overview of the research and development in DLC film technology by highlighting the key areas that are essential for the advancement of the field.This study underscores the importance of a holistic approach to the design and fabrication of DLC films and emphasizes the interplay among preparation techniques,process optimization,material modification,and surface engineering to achieve superior wear-resistant performance.This comprehensive review is significant in guiding future research and fostering innovation in the application of DLC films across various industries,and it serves as an essential reference for the further development of related technical fields.
作者
韩冰源
许建飞
杜文博
赵泳林
崔方方
李函
朱胜
HAN Bingyuan;XU Jianfei;DUWenbo;ZHAO Yonglin;CUI Fangfang;LI Han;ZHU Sheng(College of Automotive Engineering,University of Automotive Technology,Shiyan 442002,China;National Key Laboratory for Remanufacturing,Beijing 100072,China;School of Automotive and Traffic Engineering,University of Technology,Changzhou 213001,China;School of Art and Design,University of Automotive Technology,Shiyan 442002,China;Hubei Provincial Key Laboratory of Automotive Power Transmission and Electronic Control,Shiyan 442002,China)
出处
《中国表面工程》
北大核心
2025年第5期198-214,共17页
China Surface Engineering
基金
再制造技术国家级重点实验室基金(61420052023WD006)
湖北汽车工业学院博士科研启动基金(BK202482)。
关键词
类金刚石薄膜
微观结构
力学性能
摩擦学性能
diamond-like films
microstructure
mechanical properties
tribological properties
